1. Product Profile
Titanium content (>: 99.8 (%) impurity content: 0.02 (%)
Title: TA1, TA2, TA3, TC4 (Ti6AL4V), GR1, GR2, GR3, GR5 (Ti6AL4V)
Titanium round target: Technical conditions: GB/T 2695-1996, ASTM B348-97
Titanium Plate Target: Technical Conditions: GB/T3621-94, ASTM B265-93
Usage: Used in semiconductor separator, flat panel display, storage electrode film, sputtering coating, workpiece surface coating, glass coating industry
2. Product Specification
Round Target: Common Specification: 60/65/95/100*30/32/40/45mm
Plate target: (8-25) mm * (150-300) mm * (1000-2500) mm
Tube Target: Inner Diameter 55-200*Outer Diameter 70-160*Length
3. material
Grade 2 ~Grade 12
4. standard value
| Reference Standards for Chemical Constituents | |||||||||
|
material |
Al |
V |
N≤ |
C≤ |
H≤ |
Fe≤ |
O≤ |
Other elements (single) |
Other elements (sum) |
|
TA1 |
|
|
0.03 |
0.08 |
0.015 |
0.20 |
0.18 |
0.1 |
0.40 |
|
TA2 |
|
|
0.03 |
0.08 |
0.015 |
0.30 |
0.25 |
0.1 |
0.40 |
|
TC4 |
5.5-6.75 |
3.5-4.5 |
0.05 |
0.08 |
0.015 |
0.30 |
0.20 |
0.1 |
0.40 |
|
Mechanical Performance Reference Standard |
||||
| material |
Mechanical properties at room temperature, not less than |
|||
|
tensile strength |
Yield strength |
elongation |
Section shrinkage |
|
|
TA1 |
240 MPa |
170MPa |
25% |
30% |
|
TA2 |
345MPa |
275 MPa |
20% |
30% |
|
TC4 |
895MPa |
825 MPa |
10% |
20% |
